Infrared ray sensor using silicon oxide film as infrared ray...

Details Infrared ray sensor using silicon oxide film as infrared ray... Infrared ray sensor using silicon oxide film as infrared ray...

2006-09-12

2006-09-12

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07105819

ABSTRACT:
The present invention relates to a pyroelectric infrared ray sensor fabricated by using MEMS processes, wherein an infrared ray absorption layer disposed on the most top portion of the infrared ray sensor assembly is formed with a silicon oxide film (SiO2) to exhibit an excellent absorption efficiency with respect to the infrared wavelength band of 8 to 12 mm and function as a protective film for a sensor pixel. In addition, an infrared ray absorption layer, support arms and posts are formed in a single body to allow the sensor assembly to be robust and fabricating processes to be remarkably reduced to increase a process yield.

REFERENCES:
patent: 5523564 (1996-06-01), Yamada et al.
patent: 5949071 (1999-09-01), Ruffner et al.
patent: 6031231 (2000-02-01), Kimata et al.
patent: 6034374 (2000-03-01), Kimura et al.
patent: 6087661 (2000-07-01), Owen et al.
patent: 6339220 (2002-01-01), Oda
patent: 6759714 (2004-07-01), Kim et al.
patent: 2002/0139933 (2002-10-01), Iida et al.
patent: 2003/0164450 (2003-09-01), Bruchhaus et al.
patent: 2004/0214382 (2004-10-01), Park et al.
patent: 01089106 (1989-04-01), None
patent: 08-178741 (1996-07-01), None
patent: 1020000046517 (2000-07-01), None
patent: 2002-0039670 (2002-05-01), None
S. Bauer, et al.; “Thin metal films as absorbers for infrared sensors”; Sensors and Actuators; A. 37-38; 1993; pp. 497-501.

Affiliated with

Also associated with

Rating

Infrared ray sensor using silicon oxide film as infrared ray... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Infrared ray sensor using silicon oxide film as infrared ray..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Infrared ray sensor using silicon oxide film as infrared ray... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3562112