Infrared ray sensor and its producing method

Details Infrared ray sensor and its producing method Infrared ray sensor and its producing method

1995-05-23

1996-10-22

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

20419218, 427554, H01L 3700

Patent

active

055679404

ABSTRACT:
The present invention is related to an infrared ray sensor including a substrate having a p-n junction, a ferroelectric film formed on a surface of the substrate for sensing infrared ray, and a metal film formed on the ferroelectric film for serving as an infrared-ray receiving electrode. The present invention is also related to a method for producing the IR sensor including steps of: providing the substrate having the p-n junction; depositing the ferroelectric film on the surface of the substrate in a radio frequency (RF) sputtering system; and depositing the metal film on the ferroelectric film by vapor evaporation. Alternatively, the deposition of the ferroelectric film on the surface of the substrate can be performed in a KrF pulse-mode laser evaporation system.

REFERENCES:
patent: 4250384 (1981-02-01), Pulvari
patent: 5395663 (1995-03-01), Tabata et al.

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