Infrared ray detector having a vacuum encapsulation structure

Details Infrared ray detector having a vacuum encapsulation structure Infrared ray detector having a vacuum encapsulation structure

2005-08-02

2005-08-02

Gagliardi, Albert (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S332000, C250S339020, C257S433000

Reexamination Certificate

active

06924485

ABSTRACT:
An infrared ray detector includes an array of pixels each including a micro-bridge structure wherein a diaphragm is supported in spaced relationship with a substrate by a beam structure. Each pixel has a vacuum encapsulation structure supported in a base area wherein the beam structure is supported by the substrate. The vacuum encapsulation structure includes a window film encapsulating first and second vacuum spaces formed by removing first and second sacrificial films sandwiching therebetween the diaphragm.

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