Infrared ray detection device, method of fabricating the...

Details Infrared ray detection device, method of fabricating the... Infrared ray detection device, method of fabricating the...

2006-12-27

2008-03-18

Nguyen, Kimberly D. (Department: 4176)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S332000

Reexamination Certificate

active

07345278

ABSTRACT:
An infrared ray detection device has a detection cell which has a thermoelectric converting part and an infrared ray absorption layer formed via a space on a semiconductor substrate, a first wiring part formed on the semiconductor substrate, and a supporting part, the detection cell being formed via the space on the semiconductor substrate and supports the detection cell. The supporting part includes a plurality of supporting legs which have a second wiring part electrically connecting the first wiring part to the detection cell and an insulating part covering a surrounding are of the second wiring part, and at least one connection part made of an insulating material connecting the plurality of supporting legs to each other.

REFERENCES:
patent: 2003/0168598 (2003-09-01), Oda
patent: 2004/0159788 (2004-08-01), Shigenaka et al.
patent: 2005/0061980 (2005-03-01), Iida et al.
patent: 2002-107224 (2002-10-01), None
patent: 2003106894 (2003-04-01), None
Kosasayama et al., Pixel Scaling for SOI Diode Uncooled Infrared Focal Plane Arrays, Proc. SPIE vol. 5406, pp. 504-511, 2004.

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