Infrared microscope inspection apparatus

Radiant energy – Infrared-to-visible imaging – Including detector array

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H01J 3150

Patent

active

045019665

ABSTRACT:
Apparatus and system for inspecting infrared transparents, such as an array of photovoltaic modules containing silicon solar cells, includes an infrared microscope, at least three sources of infrared light placed around and having their axes intersect the center of the object field and means for sending the reflected light through the microscope. The apparatus is adapted to be mounted on an X-Y translator positioned adjacent the object surface.

REFERENCES:
patent: 4337395 (1982-06-01), Alexander et al.

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