Infrared microscope

Radiant energy – Infrared-to-visible imaging – Including detector array

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250334, 25037008, H04N 533

Patent

active

055127495

ABSTRACT:
A staring infrared microscope which includes optics for focusing a magnified image of an object onto a 2D array detector of IR sensitive elements, a processor for processing the information received from the 2D array detector, including controlling the integration time of the 2D array detector as a function of the magnification of the object to generate a thermal descriptive image of object, and a display for displaying the thermal descriptive image. Also disclosed is a scanning infrared microscope which includes optics for focusing a magnified image of an object onto a linear array detector of IR sensitive elements including a scanning mirror for scanning the object and a processor for processing the information received from the linear array detector to generate a thermal descriptive image of object. The scanning infrared microscope further includes an output display for displaying the thermal descriptive image.

REFERENCES:
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patent: 4705945 (1987-11-01), Worcester
patent: 4754704 (1988-07-01), Lubbers
patent: 4807532 (1989-02-01), Anderson et al.
patent: 5075553 (1991-12-01), Noble et al.
"The Infrared Handbook" rev. ed., Wolfe, W. & Zissis, G., eds, The Infrared Information and Analysis (IRIA) Center, Environmental Research Institute of Michigan (1985), Figure 7-5.
Yasuda, A. et al "Direct Measurement of Localized Joule Heating in Silicon Devices By Means of Newly Developed High Resolution IR Microscopy" IEEE/IRPS Journal pp. 245-249 (1991).
Shell, M. et al "Applications of Infrared Microscopy for Bond Pad Damage Detection" IEEE/IRPS Journal pp. 152-159 (1991).

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