Infrared light detection array and method of producing the same

Details Infrared light detection array and method of producing the same Infrared light detection array and method of producing the same

2005-07-05

2005-07-05

Porta, David (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S336100

Reexamination Certificate

active

06914245

ABSTRACT:
An infrared light detection array with a plurality of infrared light detectors, said infrared light detectors each comprising: a supporting leg fixed to said substrate at one end, having a laminated structure of an insulation layer and a wiring layer; and a heat insulation structure portion supported by said supporting leg, comprising an insulation layer having a first surface to serve as a surface of incidence for infrared light to impinge on and a second surface to serve as a surface of incidence for reading light to impinge on, a reflection film which is formed on said second surface of said insulation layer, and a resistor connected with said wiring layer, and as said supporting legs heated up to a detection temperature by said infrared light reversibly warp, said infrared light detectors change the reflection direction of said reading light impinging upon said reflection films.

REFERENCES:
patent: 5844238 (1998-12-01), Sauer et al.
patent: 6069359 (2000-05-01), Imada et al.
patent: 6080988 (2000-06-01), Ishizuya et al.
patent: 6469301 (2002-10-01), Suzuki et al.
patent: 10-253447 (1998-09-01), None
patent: 2000-326299 (2000-11-01), None

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