Infrared imaging array

Radiant energy – Infrared-to-visible imaging – Including detector array

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257291, H01L 310224

Patent

active

053048032

ABSTRACT:
An infrared imaging array includes a plurality of photodetectors arranged in a two-dimensional array. A first charge read-out gate is associated with each photodetector and reads out electrical charges from the associated photodetector receiving first charge read-out clock pulses output from a vertical scanner. A charge storage element is connected to each column of photodetectors and includes a storage gate opposite which a potential well is formed in a substrate. The electrical charges transferred from the photodetectors in each column are stored in the potential well. A second charge read-out gate is associated with each charge storage element and transfers the electrical charges stored in the associated charge storage element to an output diode receiving second charge read-out clock pulses from a horizontal scanner. In the present invention, an insulating film underlying the charge storage gate has a thickness that decreases stepwise in the charge transfer direction so that the depth of the potential well created opposite the storage gate increases stepwise, producing an electric field in the charge transfer direction. Therefore, a small quantity of electrical charges remaining in the potential well drift in response to the electric field, increasing charge transfer speed.

REFERENCES:
patent: 4694316 (1987-09-01), Chabbal
Chow et al., "Hybrid Infrared Focal-Plane Arrays", IEEE Transactions on Electron Devices, vol. ED-29, No. 1, Jan. 1982, pp. 3-13.

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