Infrared imager using room temperature capacitance sensor

Radiant energy – Infrared-to-visible imaging – Including detector array

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2503381, G01J 342, G01N 2700

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active

059658860

ABSTRACT:
An infrared imager includes an array of capacitance sensors that operate at room temperature. Each infrared capacitance sensor includes a deflectable first plate which expands due to absorbed thermal radiation relative to a non-deflectable second plate. In one embodiment each infrared capacitance sensor is composed of a bi-material strip which changes the position of one plate of a sensing capacitor in response to temperature changes due to absorbed incident thermal radiation. The bi-material strip is composed of two materials with a large difference in thermal expansion coefficients.

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Optical and Infrared Detection Using Microcantilevers, Oden et al., Proceedings of the SPIE-The International Society for Optical Engineering Conference, Apr. 8-12 1996, USA.

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