Infrared focal plane array with integral slot shield using spin-

Details Infrared focal plane array with integral slot shield using spin- Infrared focal plane array with integral slot shield using spin-

1992-12-10

1994-03-29

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

257435, H01J 4014

Patent

active

052987337

ABSTRACT:
A method of fabricating a focal plane array having an integral slot shield which comprises fabricating a focal plane array having a plurality of detector elements. A layer of electrically insulating material, preferably a spun on epoxy, having a planar top surface is then formed over the array. A reflective layer is then formed over the layer of electrically insulating material and the electrically insulating layer and reflective layer are etched only in the regions thereof over the detector elements to form slots over said detector elements. The electrically insulating layer is etched with a directional etchant. The etched layer of electrically insulating material defines side walls in the slots, material from the side walls being removed to define non-planar sidewalls. The non-planar side walls preferably have an essentially sawtooth shape.

REFERENCES:
patent: 3991460 (1976-11-01), Roberts
patent: 5101099 (1992-03-01), Funada et al.

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