Radiant energy – Infrared-to-visible imaging – Including detector array
Patent
1997-09-10
2000-02-29
Hannaher, Constantine
Radiant energy
Infrared-to-visible imaging
Including detector array
2503381, 2503383, G01J 520
Patent
active
060312319
ABSTRACT:
A two-dimensional infrared focal plane array of temperature detecting units is provided with the temperature detecting units being arranged for every pixel in a two-dimensional arrangement on a semiconductor substrate. Each temperature detecting unit is formed integrally with readout circuitry. Each temperature detecting unit further has a temperature detecting portion which is supported by support legs made of a high thermal resistance material to reduce heat flow to the semiconductor substrate. Each temperature detecting unit also has a temperature detecting element with an infrared ray absorbing portion which is spliced by at least one splicing pillar with the temperature detecting element.
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Takanori Sone, et al., "Performance of New Handheld IR Camera Using Uncooled Bolometer FPA", SPIE, vol. No. 2744. pp. 52-60.
Masashi Ueno, et al., "Monolithic Uncooled Infrared Image Sensor with 160.times.120 Pixels", SPIE, vol. No. 2552, pp. 636-643.
R.A. Wood, "High-Performance Infrared Thermal Imaging with Monolithic Silicon Focal Planes Operating at Room Temperature", IEDM (1993), pp. 175-177.
Patent Abstracts of Japan, vol. 017, No. 032 (E-1309), Jan. 21, 1993, JP 04 252086, Sep. 8, 1992.
Hata Hisatoshi
Ishikawa Tomohiro
Kimata Masafumi
Tsutsumi Kazuhiko
Gagliardi Albert
Hannaher Constantine
Mitsubishi Denki & Kabushiki Kaisha
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