Infrared detector using a resonant optical cavity for enhanced a

Details Infrared detector using a resonant optical cavity for enhanced a Infrared detector using a resonant optical cavity for enhanced a

1985-08-13

1995-10-03

Buczinski, Stephen C.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

25033901, 257436, G01J 520, H01L 2714

Patent

active

054554217

ABSTRACT:
A photodetector for detecting optical irradiation at a predetermined wavelength is provided with an integral, resonant optical cavity by forming a plurality of layers of material on a metallic reflector backing, the total optical thickness of those layers being an odd multiple of one-quarter of the predetermined wavelength. One of those layers is an active (i.e. optically-absorptive) semiconductor material. When the materials are deposited, that absorbing layer is formed at a level in the cavity including a region of peak optical field. As a result of the enhanced absorption provided by the resonant structure, the active layer may be very thin (i.e., less than one-tenth of a wavelength thick), yielding many beneficial results.

REFERENCES:
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patent: 3487223 (1969-12-01), St. John
patent: 4415806 (1983-11-01), Tar
J. Muller, IEEE Transactions On Electron Dev., vol. ED-25, No. 2, Feb. 1978, p. 247.
H. Elabd & W. F. Kosonocky, "The Photoresponse of Thin-Film PtSi Shottky Barrier Detector with Optical Cavity," RCA Review, vol. 43, Sep. 1982 at 542.
H. Levinstein et al. "Infrared Detectors in Remote Sensing", Proceedings of the I.E.E.E., vol. 63, No. 1, Jan. 1965 at 6.
W. F. Kosonocky & H. Elabd, "Schottky-Barrier Infrared Charge-Coupled Device Focal Plane Arrays", Proceedings of SPIE, vol. 443, at 167, San Diego, Aug. 1983.
M. A. Novice & J. Vine, "Optical Means for Enhancing the Sensitivity of a Tri-Alkali Photocathode", Applied Optics, vol. 6, No. 7, Jul. 1967.

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