Infrared detector packaged with improved antireflection element

Details Infrared detector packaged with improved antireflection element Infrared detector packaged with improved antireflection element

2005-01-04

2005-01-04

Tokar, Michael (Department: 2829)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

Reexamination Certificate

active

06838306

ABSTRACT:
An infrared detector has a window in a cover having a cavity for exposing detector pixels to incident radiation. The window has an antireflective element formed within the cavity as a field of posts. The field of post structures is formed in a cavity by etching the posts in a desired pattern first, and forming the cavity by a general etch over the whole field afterward.

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