Infrared detector devices and their manufacture

Details Infrared detector devices and their manufacture Infrared detector devices and their manufacture

1993-03-15

1994-11-22

Dzierzynski, Paul M.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

25033901, H01L 2714

Patent

active

053671660

ABSTRACT:
Compact electrical connections (4) are formed on side-walls (1) of an infrared detector element having a step structure (1 to 3) over which a conductive layer (40) is deposited. Using a directional etching treatment, such as ion milling, the conductive layer (40) is removed from at least the bottom (3) of the step structure but is left lining the side-wall (1) as the connection (4). This permits formation of connections (4 and 44) in compact dense arrays, including plural-wavelength arrays in stacked bodies (10 and 20) on a circuit substrate (30).

REFERENCES:
patent: 4972244 (1990-11-01), Buffet et al.

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