Infrared detector array with improved spectral range and...

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

Reexamination Certificate

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Reexamination Certificate

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06852976

ABSTRACT:
An infrared detector is disclosed having a first substrate made of indium phosphide and a first layer formed on the first substrate and made of indium gallium arsenide. The infrared detector further includes a second substrate, which is made of silicon and has a readout integrated circuit that is electrically coupled to the first layer. After the indium gallium arsenide material is formed, the first substrate is substantially thinned or removed by mechanical techniques and/or a chemical etch process to extend the spectral range of the infrared detector to wavelengths beyond that of a conventional infrared detector.

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Cohen et al., An Indium Gallium Arsenide Visible/Swir Focal Plane Array for Low Light Level Imaging, Aug. 1999, Sensors Unlimited, Inc., Princeton, NJ, (Report No. A252093 from http://www.stormlngmedia.us/25/2520/A252093.html, as of Sep. 24, 2004).

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