Infrared detector and manufacturing process

Details Infrared detector and manufacturing process Infrared detector and manufacturing process

1997-08-01

1999-06-15

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

H01L 3109, H01C 17075

Patent

active

059124644

ABSTRACT:
An infrared detector includes a sensitive part having a sensitive element and conducting elements. The sensitive element includes a layer of material in which the resistivity varies with the temperature. The conducting elements perform the functions of electrodes for the detector and infrared absorber. At least one support element for the sensitive part is capable of positioning the sensitive part, electrically connecting the sensitive part to a readout circuit, and thermally insulating the sensitive part from the rest of the structure. All conducting elements are places on the same surface of the layer of temperature sensitive material. The detector is manufactured according to a forming and etching process.

REFERENCES:
patent: 4640629 (1987-02-01), Antonini et al.
patent: 5095215 (1992-03-01), Shorrocks et al.
patent: 5367167 (1994-11-01), Keenan
Review of Scientific Instruments, vol. 64, No. 7, Jul. 1993, New York, US, pp. 1714-1717, XP000387100, E. Iborra et al. "A New Design of a Semiconductor Bolometer on Rigid Substrate for Fusion Plasma Diagnostics".

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