Infrared detection sensor and method of fabricating the same

Details Infrared detection sensor and method of fabricating the same Infrared detection sensor and method of fabricating the same

2011-04-19

2011-04-19

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07928388

ABSTRACT:
In an infrared detection sensor according to the present invention, all material constituting an upper portion of a sensing electrode in a supporting arm region is removed so that a supporting arm has low thermal conductivity. As a result, thermal conductivity of the infrared sensor structure is reduced, and the infrared detection sensor has excellent sensitivity.

REFERENCES:
patent: 5831266 (1998-11-01), Jerominek et al.
patent: 6144285 (2000-11-01), Higashi
patent: 2007/0215807 (2007-09-01), Tohyama
patent: 2001-281065 (2001-10-01), None
patent: 1020090065941 (2009-06-01), None
Mahmoud Almasri et al., “Self-Supporting Uncooled Infrared Microbolometers With Low-Thermal Mass,” Journal of Microelectromechanical Systems, Sep. 2001, pp. 469-476, vol. 10 No. 3, IEEE.

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