Infrared detection device comprising a pyroelectric thin film an

Details Infrared detection device comprising a pyroelectric thin film an Infrared detection device comprising a pyroelectric thin film an

1995-03-30

1996-12-31

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, G01J 102

Patent

active

055896871

ABSTRACT:
An infrared detection device has a substrate with a plurality of hollow mesas and a pyroelectric thin film formed on the surface having the mesas.

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J. Chen et al., "Rapid thermal annealing of sol-gel derived lead zirconate titanate thin films", J. Appl. Phys. 71(9), May 1, 1992, pp. 4465-4469.
N. Tohge et al., "Preparation of PbZrO.sub.3 -PbTiO.sub.3 Ferroelectric Thin Films by the Sol-Gel Process", J. Am. Ceram. Soc. 74(1), Jan. 1991, pp. 67-71.
R. Takayama et al., National Technical Report vol. 39 No. 4, Aug. 1993, pp. 122-130.
Great Britain Search Report; Application No. GB 9507900.0; Dated Jul. 14, 1995.
Ferroelectrics vol. 104 1990 (UK); R. W. Whatmore et al. "Ferroelectric Materials for IR Sensors State-of-the-Art and Perspectives", pp. 269-283.

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