Coating processes – Electrical product produced – Photoelectric
Patent
1997-08-28
1999-04-06
Beck, Shrive
Coating processes
Electrical product produced
Photoelectric
427 79, 427100, 4271263, 427379, B05D 512
Patent
active
058915125
ABSTRACT:
A solution of precursor of a pyroelectric material, e.g. BaSrTiO.sub.3, is coated on a surface of a silicon wafer having an array of mesas corresponding to infrared sensor elements to be formed thereon, and the pyroelectric material precursor coating is dried and then is subjected to a heat treatment for converting thereof into a pyroelectric thin film (sol-gel process). The internal stress in the pyroelectric thin film formed as thick as 1 .mu.m by repeating the process concentrates in the region (groove) between the mesas, hence cracks occurring in the film in connection with the stress are limited within the region and the portions of the film on the mesas can be free from the cracks. The pyroelectric thin film in the groove is selectively removed. An infrared image sensing device comprising sensor elements of uniform characteristics and high reliability is provided.
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N. Tohge et al., "Preparation of PbZrO.sub.3 0PbTiO.sub.3 Ferroelectric Thin Films by the Sol-Gel Process", J. Am. Ceram. Soc. 74(1), Jan. 1991, pp. 67-71.
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Daiku Hiroshi
Dohi Masaji
Kawata Satoshi
Sakachi Yoichiro
Beck Shrive
Fujitsu Limited
Talbot Brian K.
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