Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2008-09-10
2010-12-07
Hannaher, Constantine (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
07847252
ABSTRACT:
An infrared-detecting element includes: a substrate; a laminated body; an anchor coupling a part of the laminated body with the substrate and supporting the laminated body with a gap above the substrate; and an amplifier provided on the substrate and connected to at least one of the lower electrode and the upper electrode. The laminated body has a lower electrode, an upper electrode, and a piezoelectric film made of aluminum nitride which is provided between the lower electrode and the upper electrode and in which a c-axis is oriented almost perpendicularly to a film plane. The amplifier has a circuit performing conversion into voltage according to a charge generated in the laminated body.
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V. Fuflyigin, E. Salley, A. Osinsky, and P. Norris, “Pyroelectric properties of AIN.” Applied Physics Letters, vol. 77, No. 19, Nov. 6, 2000, pp. 3075-3077 <doi:10.1063/1.1324726>.
Fujiwara Ikuo
Honda Hiroto
Iida Yoshinori
Kawakubo Takashi
Nagano Toshihiko
Hannaher Constantine
Kabushiki Kaisha Toshiba
Turocy & Watson LLP
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