Infrared blocking filter for broadband Optical metrology

Details Infrared blocking filter for broadband Optical metrology Infrared blocking filter for broadband Optical metrology

2007-04-17

2007-04-17

Robinson, Mark A. (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Having ultraviolet absorbing or shielding property

C359S359000

Reexamination Certificate

active

10970100

ABSTRACT:
An infrared filter for an optical metrology tool includes a substrate having film stacks on opposing surfaces thereof. A first film stack can be used to reflect ultra-violet radiation and transmit radiation at non-ultraviolet wavelengths. The second film stack can be used to reflect visible to near-infrared radiation and transmit infrared radiation. The combination of film stacks can therefore extract infrared radiation from a broadband beam, with the remaining ultra-violet radiation and visible to near-infrared radiation forming the product of the filter. The filter can be used as part of the illumination or collection side optics in a broadband optical metrology tool.

REFERENCES:
patent: 4747645 (1988-05-01), Rudzki
patent: 4850661 (1989-07-01), Kawakatsu
patent: 5552927 (1996-09-01), Wheatly et al.
patent: 6415783 (2002-07-01), Harrison
patent: 7068430 (2006-06-01), Clarke et al.
patent: 2004/0085642 (2004-05-01), Condo et al.

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