Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate
2011-01-11
2011-01-11
Von Buhr, M. N. (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Optimization or adaptive control
C700S028000, C700S045000, C700S121000, C702S085000
Reexamination Certificate
active
07869888
ABSTRACT:
A information processing apparatus100for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus200for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion101for receiving the set value; a state value receiving portion102for receiving the acquired value; a correction amount calculating portion103for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion104for correcting the acquired value received by the state value receiving portion102, using the correction amount calculated by the correction amount calculating portion103; and an output portion105for outputting a result of correction performed by the correcting portion104.
REFERENCES:
patent: 4594510 (1986-06-01), Brown et al.
patent: 5070846 (1991-12-01), Dudek et al.
patent: 5993043 (1999-11-01), Fujii
patent: 6161054 (2000-12-01), Rosenthal et al.
patent: 6376139 (2002-04-01), Fujisawa et al.
patent: 6496749 (2002-12-01), Yamaguchi et al.
patent: 6567720 (2003-05-01), Figiel
patent: 6697749 (2004-02-01), Kamitani
patent: 7016049 (2006-03-01), Kurosawa
patent: 7115424 (2006-10-01), Nakao
patent: 7155319 (2006-12-01), Nangoy et al.
patent: 7256892 (2007-08-01), Nakajima
patent: 7566181 (2009-07-01), Yang et al.
patent: 7631555 (2009-12-01), Nakano et al.
patent: 2004/0138773 (2004-07-01), Tomoyasu
patent: 2004/0199323 (2004-10-01), Mizuno et al.
patent: 2005/0064609 (2005-03-01), Nagaoka et al.
patent: 2006/0060602 (2006-03-01), Jeong
patent: 2006/0100735 (2006-05-01), Hauf et al.
patent: 2006/0172442 (2006-08-01), Okabe et al.
patent: 2006/0196960 (2006-09-01), Yu et al.
patent: 2006/0212156 (2006-09-01), Tanaka et al.
patent: 2007/0270983 (2007-11-01), Yasui
patent: 2007/0280609 (2007-12-01), Ito
patent: 2008/0183312 (2008-07-01), Funk et al.
patent: 2002-25997 (2002-01-01), None
Leang et al., A Control System for Photolithographic Sequences, 1996, IEEE Transactions on Semiconductor Manufacturing, v.9, n.2, pp. 191-207.
Lachman-Shalem et al., Nonlinear Modeling and Multivariable Control of Photolithography, 2002, IEEE Transactions on Semiconductor Manufacturing, v.15, n.3, pp. 310-322.
Su et al., A Processing Quality Prognostics Scheme for Plasma Sputtering in TFT-LCD Manufacturing, 2006, IEEE Transactions on Semiconductor Manufacturing, v.19, n.2, pp. 183-194.
Schaper et al., Modeling and Control of Rapid Thermal Processing, 1992, SPIE Proceedings of Rapid Thermal and Integrated Processing, The International Society for Optical Engineering, v.1595, pp. 2-17.
Koyama Noriaki
Obata Minoru
Wang Wenling
Buhr M. N. Von
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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