Inflatable elastomeric element for rapid thermal processing (RTP

Details Inflatable elastomeric element for rapid thermal processing (RTP Inflatable elastomeric element for rapid thermal processing (RTP

1997-07-17

1999-02-09

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

219390, 219405, 219411, 392418, 118725, 118730, 118 501, A21B 200, L23L 1400

Patent

active

058705260

ABSTRACT:
A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.

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patent: 4632624 (1986-12-01), Mirkovich
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patent: 5516367 (1996-05-01), Lei
patent: 5551985 (1996-09-01), Brors et al.
patent: 5592581 (1997-01-01), Okase
patent: 5645301 (1997-07-01), Kingsford
patent: 5683518 (1997-11-01), Moore
patent: 5708755 (1998-01-01), Gronet

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