Electricity: circuit makers and breakers – Special application – Change of inclination or of rate of motion responsive
Reexamination Certificate
2007-03-29
2009-12-15
Friedhofer, Michael A (Department: 2833)
Electricity: circuit makers and breakers
Special application
Change of inclination or of rate of motion responsive
C200S061500
Reexamination Certificate
active
07633025
ABSTRACT:
A micro-electromechanical system (MEMS) switch comprises a trench formed in a substrate. A free moving conductive mass may be formed within the cavity. When the switch is moved or otherwise acted upon my an inertial force to conductive mass makes contact with a pair of electrodes partially covering the trench thus turning the switch on.
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patent: 7384821 (2008-06-01), Sung
Heck John
Smith Joshua R.
Sundara-Rajan Kishore
Friedhofer Michael A
Intel Corporation
Klaus Lisa N
Reif Kevin A.
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