Inertial sensor with dual cavity package and method of...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C310S329000, C310S348000, C310S344000

Reexamination Certificate

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08080925

ABSTRACT:
Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

REFERENCES:
patent: 6262520 (2001-07-01), Knowles
patent: 6534711 (2003-03-01), Pollack
patent: 6748807 (2004-06-01), Yoshiuchi et al.
patent: 6917142 (2005-07-01), Koyama et al.
patent: 2001/0054860 (2001-12-01), Knowles
patent: 2004/0017004 (2004-01-01), Kasai et al.
patent: 2007/0101812 (2007-05-01), MacGugan
patent: 2009/0322183 (2009-12-01), Kawakubo et al.
patent: 1813951 (2007-08-01), None

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