Inertial sensor and manufacturing method of the same

Details Inertial sensor and manufacturing method of the same Inertial sensor and manufacturing method of the same

2007-06-15

2010-02-09

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514380

Reexamination Certificate

active

07658109

ABSTRACT:
A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjusted and a plurality of deformation modes having different sensitivity ranges with respect to the acceleration are used in combination. By this means, it is possible to improve a detecting sensitivity of an acceleration and widen an acceleration response range.

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S. Lewis et al., “Integrated Sensor and Electronics Processing for >10^8 ‘iMEMS’ Inertial Measurement Unit Components,” Technical Digest of IEEE Electron Devices Meeting, 2003, pp. 39.1.1-39.1.4.

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