Inertial measurement unit using rotatable MEMS sensors

Details Inertial measurement unit using rotatable MEMS sensors Inertial measurement unit using rotatable MEMS sensors

2007-05-01

2007-05-01

Kwok, Helen (Department: 2856)

Data processing: measuring, calibrating, or testing

Measurement system

Speed

C702S096000

Reexamination Certificate

active

11414895

ABSTRACT:
A MEM inertial sensor (e.g. accelerometer, gyroscope) having integral rotational means for providing static and dynamic bias compensation is disclosed. A bias compensated MEM inertial sensor is described comprising a MEM inertial sense element disposed on a rotatable MEM stage. A MEM actuator drives the rotation of the stage between at least two predetermined rotational positions. Measuring and comparing the output of the MEM inertial sensor in the at least two rotational positions allows for both static and dynamic bias compensation in inertial calculations based on the sensor's output. An inertial measurement unit (IMU) comprising a plurality of independently rotatable MEM inertial sensors and methods for making bias compensated inertial measurements are disclosed.

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