Inertial drive actuator

Details Inertial drive actuator Inertial drive actuator

2008-07-03

2010-06-15

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S309000, C310S316010, C310S317000, C310S323010

Reexamination Certificate

active

07737606

ABSTRACT:
To provide an inertial drive actuator that is easy to assemble and achieves high accuracy in position detection, the actuator has a fixed member, a vibration substrate, a piezoelectric element (movement unit), first and second moving bodies that moves relative to the vibration substrate by inertia, a first electrode provided on the surface of each of the first and second moving bodies, a second electrode provided on a surface of the vibration substrate, an insulating film provided between the first electrode and the second electrode, a drive unit, and a position detection unit that detects the position of the moving body with respect to the vibration substrate based on capacitance of the portion in which the first electrode and the second electrode are opposed to each other.

REFERENCES:
patent: 7462974 (2008-12-01), Matsuki
patent: 7462975 (2008-12-01), Matsuki
patent: 7535661 (2009-05-01), Matsuki
patent: 2006/0267450 (2006-11-01), Matsuki
patent: 2008/0018202 (2008-01-01), Matsuki
patent: 2008/0278840 (2008-11-01), Matsuki
patent: 2003-185406 (2003-07-01), None

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