Industrial robot hand with position sensor

Details Industrial robot hand with position sensor Industrial robot hand with position sensor

1987-01-12

1988-01-19

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294907, 901 40, 901 46, B25J 1506, B25J 1902

Patent

active

047201304

ABSTRACT:
A robot for transporting a semiconductor wafer comprises a robot hand for engaging and retaining a semiconductor wafer, and at least one position sensor for detecting whether the semiconductor wafer is present at a predetermined position on the robot hand. The robot hand includes a first support plate for supporting the retained semiconductor wafer and a second support plate provided with the at least position sensor for supporting the first support plate.

REFERENCES:
patent: 3223442 (1965-12-01), Fawdry et al.
patent: 4266905 (1981-05-01), Birk et al.
patent: 4423998 (1984-01-01), Inaba et al.
patent: 4441817 (1984-04-01), Pryor
patent: 4451197 (1984-05-01), Lange
patent: 4463980 (1984-08-01), Orii
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4603897 (1986-08-01), Foulke et al.

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