Inductor Q value improvement

Details Inductor Q value improvement Inductor Q value improvement

2006-01-24

2006-01-24

Munson, Gene M. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

Reexamination Certificate

active

06989578

ABSTRACT:
An inductor in an integrated circuit comprises a conductive trace disposed over an insulating layer which overlies a semiconductor substrate of a first conductivity type and at least two deep wells of opposite conductivity type in the substrate underneath the track. In another embodiment, an inductor in an integrated circuit comprises a conductive trace disposed over an insulating layer which overlies a semiconductor substrate of a first conductivity type; a shallow trench isolation region formed in the substrate underneath the trace; and at least two deep wells of opposite conductivity type in the substrate underneath the shallow trench isolation region. The present invention also includes methods of manufacturing the aforementioned inductors.

REFERENCES:
patent: 5952704 (1999-09-01), Yu et al.
patent: 6008713 (1999-12-01), Nasserbakht
patent: 6143614 (2000-11-01), Nasserbakht
patent: 6225677 (2001-05-01), Kobayashi
patent: 6495903 (2002-12-01), Xu et al.
patent: 6535101 (2003-03-01), Ahn et al.
patent: 6753591 (2004-06-01), Yu

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