Inductor device with patterned ground shield and ribbing

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component

Reexamination Certificate

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C438S238000, C438S655000

Reexamination Certificate

active

06905889

ABSTRACT:
Inducting devices having a patterned ground shield with ribbing in an integrated circuit. In one embodiment, an inducting device comprises conductive turns to conduct current, a shield layer and a plurality of ribs. The shield layer is formed a select distance from the conductive turns. The shield layer is patterned into sections of shield to prevent eddy currents. The plurality of ribs are formed from a conductive layer that is positioned between the conductive turns and shield layer. Each rib is electrically coupled to a single associated section of shield. Moreover, each rib is more conductive than its associated section of shield to provide a less resistive current path than its associated section of shield.

REFERENCES:
patent: 5717243 (1998-02-01), Lowther
patent: 6437409 (2002-08-01), Fujii
patent: 6486529 (2002-11-01), Chi et al.
patent: 6593838 (2003-07-01), Yue
patent: 6635949 (2003-10-01), Lowther et al.
patent: 6815220 (2004-11-01), Crawford et al.
patent: 2002/0093414 (2002-07-01), Wong et al.
“Handbook of Semiconductor Silicon Technology,” eds. William C. O'Mara, Robert B. Herring, and Lee P. Hunt, Noyes Publications., Norwich, New York, (reprint edition 1990), pp. 700-702.
“Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI),” ed. Gary E. McGuire, Noyes Publications, Norwich, New York, (1988) p. 439.

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