Inductor-based MEMS microphone

Details Inductor-based MEMS microphone Inductor-based MEMS microphone

2007-07-03

2007-07-03

Tran, Sinh (Department: 2615)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S176000, C381S177000

Reexamination Certificate

active

10874451

ABSTRACT:
An inductor-based integrated MEMS microphone and a method of making the microphone is provided. The microphone structure includes a vibrating inductor that is suspended over another stationary inductor such that the magnetic field induced from one inductor induces an electrical potential across the other. The stationary inductor is embedded in a dielectric material that is etched out over the stationary inductor to provide the cavity over which the vibrating inductor is suspended.

REFERENCES:
patent: 7054460 (2006-05-01), Rombach et al.
Tounsi, et al., CMOS integrated micromachined inductive microphone, Microelectronics, 2004. ICM 2004 Proceedings. The 16th International Conference on Dec. 6-8, 2004 pp. 109-112.
“Nonlinear Effects in MEMS Capacitive Microphone Design”, S. Chowdhury, M. Ahmadi, W.C. Miller, Electrical and Computer Engineering University of Windsor, Proceedings of the International Conference on MEMS, NANO and Smart System (ICMENS'03), 2003, IEEE.

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