Inductively-coupled RF plasma torch

Details Inductively-coupled RF plasma torch Inductively-coupled RF plasma torch

1990-06-21

1991-05-21

Paschall, M. H.

Electric heating

Metal heating

By arc

21912159, 21912148, 31511151, B23K 900

Patent

active

050177516

ABSTRACT:
An inductively coupled RF plasma generator and method. The plasma generator includes a body having a conduit having a gas inlet and an outlet. Induction structure surrounding the conduit inductively excites the gas, generating a plasma which leaves the conduit outlet as a tail flame. An electrically insulating chimney is positioned at the outlet so that the chimney surrounds the tail flame and no electrical path to ground exists between the outlet and the chimney means. A grounded electrode is positioned downstream of the plasma and sufficiently near the outlet to provide an electrical path to ground from the tail flame shorter than other available paths to ground. The method for generating a plasma utilizing the inductively coupled RF plasma generator involves inductively exciting the gas to generate a plasma which leaves the outlet as a tail flame. The tail flame is surrounded by a chimney so that no path to ground exists between the outlet and the chimney. A preferred path to ground is provided by an electrode which attracts the tail flame, preventing unwanted arcing and increasing the efficiency of the torch.

REFERENCES:
patent: 3660715 (1972-05-01), Post
patent: 4727236 (1988-02-01), Hull et al.
patent: 4739147 (1988-04-01), Meyer et al.
patent: 4766287 (1988-08-01), Morrisroe et al.
patent: 4849675 (1989-07-01), Muller
T. Kameyama et al., ISPC-8 Tokyo, 1987, Paper No. P-159, pp. 2065-2070.
R. M. Young et al., Plasma Chemistry and Plasma Processing, 5 (1), 1985, pp. 1-37.
Toyonobu Yoshida et al., J. Appl. Phys. 54 (2), Feb. 1983, pp. 640-646.

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