Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Reexamination Certificate
2005-03-15
2005-03-15
Lee, John R. (Department: 2881)
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
Reexamination Certificate
active
06867859
ABSTRACT:
The present invention relates to an apparatus and method for forming a plasma in the exhaust line of a primary process reactor. The plasma is generated in an inductive source (5) to examine the chemical concentrations of the waste or exhaust gas in vacuum lines that are below atmospheric pressure. The optical radiation emitted by the plasma is analyzed by an optical spectrometer (9) and the resulting information is used to diagnose, monitor, or control operating states in the main vacuum vessel.
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Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld LLP
Lightwind Corporation
Smith II Johnnie L
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