Induction heating coil for the floating zone pulling of crystal

Details Induction heating coil for the floating zone pulling of crystal Induction heating coil for the floating zone pulling of crystal

1987-02-04

1988-06-07

Pellinen, A. D.

Electric heating

Metal heating

Of cylinders

336223, 336232, H01F 2728, H01F 2730

Patent

active

047498374

ABSTRACT:
An induction heating coil for a zone pulling of semiconductor rods assures the disturbance-free performance of the pulling process even at the high power densities required for large rod diameters (approximately 10 to 12 cm). According to the invention, the arc-over paths between surfaces in the region of the coil slot, which are at differing potentials, are covered by one or more movable planar structures of temperature-stable insulating material which are introduced into the coil slot.

REFERENCES:
patent: 1891481 (1932-12-01), Scofield
patent: 3886509 (1975-05-01), Keller

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