Induction heater for floating zone melting

Details Induction heater for floating zone melting Induction heater for floating zone melting

1987-07-21

1989-01-10

Leung, Philip H.

Electric heating

Metal heating

Of cylinders

219 1043, 219 1071, 373139, H05B 640

Patent

active

047975253

ABSTRACT:
When semiconductor rods during floating zone melting are doped with dopants having a very low distribution coefficient, the non-homogeneous temperature distribution causes a relatively strong non-homogeneous separation of the dopants (striation). The homogeneity can be improved through an after-heater (6) connected to the heating coil (4) and arranged on the side of the monocrystalline rod part (2), the heater being coaxial with the coil and connected parallel to it.

REFERENCES:
patent: 3472992 (1969-10-01), Geisel
patent: 3886509 (1975-05-01), Keller
patent: 3935059 (1976-01-01), Ayel
patent: 4506132 (1985-03-01), Keller
patent: 4538279 (1985-08-01), Keller

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