Electric lamp and discharge devices – Fluent material supply or flow directing means – Plasma
Reexamination Certificate
2007-07-06
2008-11-18
Tran, Thuy Vinh (Department: 2821)
Electric lamp and discharge devices
Fluent material supply or flow directing means
Plasma
C315S111210
Reexamination Certificate
active
07453191
ABSTRACT:
The present invention relates, in general, to an induction concentration remote atmospheric pressure plasma generating apparatus, and more particularly, to an induction concentration remote atmospheric pressure plasma generating apparatus in which induction electrodes, discharge electrodes and a ground electrode are used, so that a plasma can be generated in a plasma cell including several metal discharge electrodes by using one power supply device while not generating arc between the metal electrodes, and a high-density plasma is generated at local regions due to a discharge between the metal electrodes and is thus spouted to the surface of a sample by means of the pressure of a working gas. Thus, a plasma is not generated in unnecessary regions.
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Le Tung X
Park John K.
Park Law Firm
Tran Thuy Vinh
UION Co., Ltd.
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