Individual configuration

Details Individual configuration Individual configuration

2006-03-28

2006-03-28

Pert, Evan (Department: 2826)

Registers

Records

C235S488000, C235S492000, C235S494000, C257S048000

Reexamination Certificate

active

07017821

ABSTRACT:
An individual configuration contains at least a first structure and a second structure, which are aligned with respect to each other. A position sensing device that senses a relative position of the first structure with respect to the second structure, in order to establish that a manipulation has been performed on the configuration, is provided.

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L.M. Vitomirov et al., “Lateral Power MOSFET Low-Doped Drain (LDD) Misalignment Test Structure”, Mar. 1997, Proc. IEEE 1997 Int. Conference on Microelectronic Test Structures, vol. 10, pp. 31-34.

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