Indium tin oxide target, method for manufacturing the same,...

Details Indium tin oxide target, method for manufacturing the same,... Indium tin oxide target, method for manufacturing the same,...

2011-01-04

2011-01-04

Kopec, Mark (Department: 1796)

Compositions

Electrically conductive or emissive compositions

Metal compound containing

C252S521100

Reexamination Certificate

active

07862748

ABSTRACT:
Disclosed are an indium Tin Oxide (ITO) target, a method for manufacturing the same, a transparent conductive film of ITO, and a method for manufacturing the transparent conductive film of ITO. The ITO target includes at least one oxide selected from the group consisting of Sm2O3and Yb2O3, wherein an amount of the oxide is about 0.5 wt. % to about 10 wt. % based on the weight of the target.

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patent: 2010/0053523 (2010-03-01), Umeno et al.
patent: WO2007/058066 (2007-05-01), None

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