Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2007-10-23
2007-10-23
McNeil, Jennifer (Department: 1775)
Stock material or miscellaneous articles
Composite
Of inorganic material
C428S702000, C428S432000
Reexamination Certificate
active
10986597
ABSTRACT:
A process for the deposition of transparent and conductive indium-tin oxide (ITO) films with a particularly low resistance of preferably less than 200 μΩcm and a small surface roughness of preferably less than 1 nm on a substrate, wherein combined BF/DC sputtering of an indium-tin oxide (ITO) target is employed and wherein the process gas is supplemented by an argon/hydrogen mixture as reaction gas during the sputtering, as well as ITO-films with the above-named characteristics.
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Klöppel Andreas
Trube Jutta
McNeil Jennifer
Speer Timothy M.
Unaxis Deutschland GmbH
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