Indium or tin bonded megasonic transducer systems

Details Indium or tin bonded megasonic transducer systems Indium or tin bonded megasonic transducer systems

2005-06-14

2005-06-14

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

C134S902000, C310S334000

Reexamination Certificate

active

06904921

ABSTRACT:
A megasonic cleaning system comprised of a container, a resonator, one or more piezoelectric crystals and a bonding layer comprised of indium or tin for attaching the piezoelectric crystal to the resonator. The resonator comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, aluminum, ceramics and stainless steel. The piezoelectric crystal may be attached directly to a side or to the bottom of the container, in which case the container acts as the resonator.

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