Indium antimonide (InSb) photodetector device and structure for

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

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257441, 257631, H01L 2714

Patent

active

056464371

ABSTRACT:
The light receiving or back-side surface (22) of an indium antimonide (InSb) photodetector device (10) substrate (12) is cleaned to remove all native oxides of indium and antimony therefrom. A passivation layer (26) is then formed on the surface (22) of a material such as silicon dioxide, silicon suboxide and/or silicon nitride which does not react with InSb to form a structure which would have carrier traps therein and cause flashing. The device (10) is capable of detecting radiation over a continuous spectral range including the infrared, visible and ultraviolet regions.

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patent: 5086328 (1992-02-01), Kasai et al.
patent: 5130259 (1992-07-01), Bahraman
patent: 5262633 (1993-11-01), Kasai et al.

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