Indium alloy cold weld bumps

Metal fusion bonding – Process – Using only pressure

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2281802, H01L 2198

Patent

active

051863790

ABSTRACT:
An improved method for indium bonding of surfaces comprising forming indium bumps on a first surface, such as a semiconductor chip. An alloying metal which forms a primary-intermetallic-free alloy with indium is provided on a second surface, such as a substrate to be connected to the pad of the semiconductor chip. The pad and substrate are cold welded at 2000 to 6000 pounds per square inch (1.0.times.10.sup.5 to 3.1.times.10.sup.5 mm Hg) to form indium alloy bonds having improved strength, reliability, and toughness.

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patent: 4930001 (1990-05-01), Williams

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