Incremental tuning process for electrical resonators based...

Details Incremental tuning process for electrical resonators based... Incremental tuning process for electrical resonators based...

2007-10-10

2009-12-15

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S593000, C029SDIG016, C216S052000, C216S072000, C310S312000

Reexamination Certificate

active

07631412

ABSTRACT:
The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.

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