Increasing stabilized performance of amorphous silicon based dev

Details Increasing stabilized performance of amorphous silicon based dev Increasing stabilized performance of amorphous silicon based dev

1996-02-09

1997-07-08

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

136258, 257 53, 257458, 427575, 427578, 437100, 437101, 437113, H01L 3120

Patent

active

056460503

ABSTRACT:
High quality, stable photovoltaic and electronic amorphous silicon devices which effectively resist light-induced degradation and current-induced degradation, are produced by a special plasma deposition process. Powerful, efficient single and multi-junction solar cells with high open circuit voltages and fill factors and with wider bandgaps, can be economically fabricated by the special plasma deposition process. The preferred process includes relatively low temperature, high pressure, glow discharge of silane in the presence of a high concentration of hydrogen gas.

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