Incorporating film optical property measurements into...

Details Incorporating film optical property measurements into... Incorporating film optical property measurements into...

2007-09-05

2010-02-16

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S237200

Reexamination Certificate

active

07663766

ABSTRACT:
A method includes collecting optical data from an unpatterned region including a first process layer. At least one optical parameter of the first process layer is determined based on the optical data associated with the unpatterned region. Optical data is collected from a patterned region including a second process layer. At least one characteristic of the patterned region is determined based on the optical data associated with the patterned region and the at least one optical parameter.

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