Inclination sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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33366, 33391, G01C 912

Patent

active

052612791

ABSTRACT:
A rotor for detecting inclination angles in relation to a defined rotational axis perpendicular to the direction of the field of gravity is proposed. In the center area of the sensor interior, enclosed by a housing, a mounting (25) is located, which is fixed in relation to the housing (30), and on which a seismic mass is suspended so that it can swing. The seismic mass is formed in the shape of a rotor (10) which is asymmetrical in respect to the mounting (25) and which can perform excursions around an axis defined by the mounting (25). Portions (11, 12) of the rotor (10) constitute electrodes of a capacitor arrangement. A border (20), fixed in relation to the housing (30), is disposed around the rotor (10) parallel to the axis defined by the mounting (25). The portions (21, 22, 23) of the border (20) constitute the backplate electrodes of the capacitor arrangement.

REFERENCES:
patent: 3372386 (1968-03-01), Klinger
patent: 4094073 (1978-06-01), Parra
patent: 4159577 (1979-07-01), Bergkvist
patent: 4831879 (1989-05-01), Condne et al.
Yu-Chong Tai and Richard S. Muller, "IC-Processed Electrostatic Synchronous Micromotors", 20 (1989), pp. 49 to 55.
W. Ehrfeld, "The LIGA Process for Microsystems" in Micro System Technologies 90 edited by Herbert Reichl, 1990, Springer-Verlag Berlin, New York, pp. 520-537.

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