Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1994-10-27
1995-12-05
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
356401, G01N 2186
Patent
active
054731666
ABSTRACT:
An inclination detecting device has a light emitting system for emitting a parallel light flux to a substrate; a light receiving system for condensing the light reflected from the substrate, detecting the reflected light photoelectrically and outputting a photoelectric signal in accordance with the intensity of the reflected light; a stop member for changing at least one of the shape and the size of an illumination area of the parallel light flux on the substrate; an adjusting unit for changing the intensity of the photoelectric signal in accordance with the change of at least one of the shape and the size of the illumination area defined by the stop member; and a unit for detecting an inclination of the substrate with respect to a predetermined reference plane based on the photoelectric signal from the light receiving system.
REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4902900 (1990-02-01), Kamiya et al.
patent: 5015866 (1991-05-01), Hayashi
Imai Yuji
Wakamoto Shinji
Le Que T.
Nikon Corporation
Westin Edward P.
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