Inclination detecting apparatus

Details Inclination detecting apparatus Inclination detecting apparatus

1995-11-08

1998-03-17

Hellner, Mark

Optics: measuring and testing

Angle measuring or angular axial alignment

Photodetection of inclination from level or vertical

3561522, 356375, 356400, G01C 306

Patent

active

057293376

ABSTRACT:
An inclination detecting apparatus has an irradiating optical system for illuminating a substrate to be measured with parallel light flux diagonally, a condensing optical system for condensing the parallel light flux reflected by the substrate, a photoelectric detecting device for generating detection signals corresponding to a position of the parallel light flux condensed by the condensing optical system, a relative scanning device for scanning the parallel light flux emitted from the irradiating optical system to the substrate and the substrate relatively and a calculating circuit for obtaining information corresponding to an inclination of an average plane of a surface of the substrate by performing a statistical processing for the detection signals taken from the photoelectric detecting device in accordance with a relative scanning position of the parallel light flux and the substrate.

REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4709156 (1987-11-01), Murphy et al.
patent: 5473166 (1995-12-01), Imai et al.
patent: 5510892 (1996-04-01), Mizutani et al.
patent: 5602399 (1997-02-01), Mizutani
patent: 5602400 (1997-02-01), Kawashima

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