Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1989-09-25
1991-07-23
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
H01L 4108
Patent
active
050346474
ABSTRACT:
An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.
REFERENCES:
patent: 4455501 (1984-06-01), Tojo et al.
patent: 4585969 (1986-04-01), Tanaka
patent: 4714855 (1987-12-01), Fujimoto
patent: 4777398 (1988-10-01), Shibuya
patent: 4850709 (1989-07-01), Ban et al.
patent: 4887404 (1989-12-01), Ohtsuka
Budd Mark O.
Canon Kabushiki Kaisha
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